semiXicon provides high quality electrostatic chuck used in HITACHI, LAM,TEL,AMAT,SEMCO etch and CVD systems refurbishing , rebuilding and redesigning services,this can be a significant cost and lead time reduction to semicon,solar,LED and MEMS industry.
The services includes:
Incoming inspection
- Measurement of orveral surface parallelism and flatness and mechanical dimensions
- Dielectric thickness measurements
- Ultrasonic bond inspection
- Cosmetic inspection
Refurbishing
- Remove deposition material from ESC
- Resealing ceramic and heater
- Resurface wafer contact surface
Verification test
- Surface roughness
- Wafer clamping forces
- ESC voltages
- ESC vacuum
- Declamping
www.semixicon.com
E.G. SEMCO J082016-5；J082238-2 ; Varian E11098654；E11098653
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